Plasma Conversion Systems (PCS)

Plasma Conversion PCS TROPO & PCS STRATO

The PCS TROPO and PCS STRATO atmospheric plasma conversion systems are high performance plasma sources, developed to destroy perfluorinated compounds such as CF₄, CHF₃, SF6 and NF₃ that are emitted from semiconductor etch and related processes.

The reactive by-products created by the both PCS systems are best removed using a CLEANSORB® dry bed chemisorber. For existing installations requiring PFC removal capability, the both PCS systems are readily retrofitted upstream of existing abatement systems such as central wet scrubbers.

Your advantages

• Combustion of up to 200 slm NH3 and 400 slm H₂
• Optimized combustion with low NOx-emissions up to 50% compared to other abatement systems
• No additional fuel gas, extremely low CoO
• Hybrid technology using direct and indirect energy sources
• Resource-saving, water-free operation
• Increased productivity
• Low installation costs
• Low operating costs
• Low maintenance costs

Plasma Conversion PCS EXO

The PCS EXO system is a high performance plasma source, developed to destroy NH₃ which is emitted from GaN and related processes.

For existing installations requiring NH₃ removal capability, the PCS EXO is readily retrofitted. Chlorine used during cleaning steps is best removed using a CLEANSORB® dry bed chemisorber.

Your advantages:

• Combustion of up to 200 slm NH₃ and 400 slm H₂
• Optimized combustion with low NOx-emissions up to 50% compared to other abatement systems
• No additional fuel gas, extremely low CoO
• Hybrid technology using direct and indirect energy sources
• Resource-saving, water-free operation
• Increased productivity
• Low installation costs
• Low operating costs
• Low maintenance costs

We will be happy to answer specific questions you might have – please call us or send us an e-mail.

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