COMPOUND SEMICONDUCTORS (MOCVD)
Given the relatively high usage of toxic hydride gases such as arsine, phosphine and hydrazine, MOCVD ranks among the most safety-critical of applications in terms of exhaust gas management. Safety of personnel and elimination of toxic emissions to the air and waterways are of primary concern.
|Typical Gases Used
|AsH3, PH3, NH3, TBAs, TBP, UDMH, TMAl, TMGa, TMIn, H2