Ismaning, June 2010
Learn more about the Safe Abatement of On-Site Fluorine Generators at the IHTESH 2010
On-site Fluorine Generation is rapidly gaining popularity among semiconductor and solar panel manufacturers as an eco-friendly alternative to the use of global warming PFC gases. Despite the many processing advantages, safety remains of critical importance, given the toxic and highly corrosive nature of the gases F2 and HF.
Purpose-designed CLEANSORB scrubber installations based on CS CLEAN SYSTEMS’ dry bed chemisorption technology are already successfully up-and-running at a number of semiconductor and photovoltaic manufacturing sites. The systems are designed to ensure the safe abatement of fluorine gases during venting, as well as a safeguard against unforeseen releases of the gases F2 and HF during abnormal operating conditions.
Sign up for the IHTESH 2010 conference, and listen to our presentation on June 23rd by Roland Poehlmann, who will be joined on the speakers’ podium by Bertrand Le Faou of Linde Electronic Gases.
