CS CLEAN SYSTEMS AG – as the global leader in dry bed absorber technology – has successfully developed a customized gas abatement solution for on-site fluorine generators.
The Semiconductor, TFT-LCD, and Photovoltaic industries have been rapidly increasing their global consumption of PFC (perfluorocarbon) gases as a source of fluorine radicals for process chamber cleaning. Unlike PFCs, elemental fluorine (F2) has no global warming potential and generates fundamentally lower manufacturing costs than gases derived from fluorine.
On-site fluorine generators are becoming quite popular, due to the significant volumes of gases and chemicals required for solar cell manufacturing. For instance, in thin-film processes gas can account for 15-20% of the cost of solar cell production.
Low-pressure on-site fluorine generation and delivery provide an environmentally friendly and cost-effective alternative for the safe and reliable supply of fluorine to both thermally activated and plasma-enhanced CVD process chamber cleaning.
CS CLEAN SYSTEMS’ customized gas abatement solution is based on the widely used CLEAN-PROTECT platform.
The CLEAN-PROTECT CP1000SCF is designed to handle all gas vent lines, and additionally works as an emergency absorber, fulfilling the high safety and environmental standards. The system is suitable for high total flow rates up to 3600 m3/h and offers an excellent absorption capacity of 345000 STP liter HF or 172500 STP liter F2.