CS200FS FABLINE for the purification of exhaust gases
The CLEANSORB® exhaust gas abatement systems CS200FS FABLINE for the purification of exhaust gases from different PECVD processes were installed in 2015 and 2016. The institute is the transfer point for research, development and service to production scale and is therefore strongly involved in technology transfer to the industry. In addition to efficiency, operator guidance and communication with the process equipment, it is decisive that the exhaust gas abatement systems are not only suitable for research applications but also for industrial scale production.
Like other high-tech semiconductor production the manufacturing of silicon solar cells involves the use of special process gases, the majority of which are pyrophoric, toxic, or corrosive. Thus, personnel safety and protection of the environment are matters of the highest priority. Therefore, the exhaust gas abatement system CLEANSORB® CS200FS FABLINE by CS CLEAN SOLUTIONS AG, who have more than 30 years of experience in the semiconductor industry, was installed in the new PV Lab.
The CLEANSORB® waste gas abatement system removes hazardous process gases by chemical conversion to stable salts at ambient temperature (chemisorption). No external heating, moisturization, or other facilities are required for operation. Hence, the CLEANSORB® system is fully passive, and is permanently ready to abate, even in the event of a power- or other facilities failure. In addition, the maintenance is done by CS CLEAN SOLUTIONS personnel and the refilling of consumed CLEANSORB® modules in their local Refill Service Center.
