Konzentrationen am Auslass der CLEANSORB Trockenbettabsorber *

Gas oder Flüssiger PrecursorSummenformelAuslasskonzentration
AmmoniakNH320 ppm
ArsinAsH30.05 ppm
Bis(tert-butylamino)silanSiH2(NHC4H9)25 ppm (SiH4)
BortribromidBBr31 ppm
BortrichloridBCl31 ppm
BortrifluoridBF30.35 ppm
BromBr20.1 ppm
BromwasserstoffHBr1 ppm
ChlorCl20.5 ppm
ChlortrifluoridClF30.1 ppm
ChlorwasserstoffHCl2 ppm
ChromhexacarbonylCr(CO)62 mg/m3 (Cr)
Di(cyclopentadienyl)magnesiumMg(C5H5)23 mg/m3 (MgO)
DiboranB2H60.1 ppm
DichlorsilanSiH2Cl22 ppm (HCl)
DiethylaminC4H11N5 ppm
DiethyltellurTe(C2H5)20.1 mg/m3 (Te)
Diethylzink (DEZn)Zn(C2H5)22 mg/m3 (Zn)
DigermanGe2H60.2 ppm (GeH4)
DimethylaminC2H7N2 ppm
DimethylcadmiumCd(CH3)20.01 mg/m3 (Cd)
DimethyldimethoxysilanSi(CH3)2(OCH3)25 ppm (SiH4)
Dimethylhydrazin (UDMH)N2H2(CH3)20.01 ppm
DimethylsilanSiH2(CH3)25 ppm (SiH4)
DimethyltellurTe(CH3)20.1 mg/m3 (Te)
DimethylzinkZn(CH3)22 mg/m3 (Zn)
DisilanSi2H65 ppm
EthylmethylaminC3H9N2 ppm (Dimethylamin)
FluorF21 ppm
Fluorophosgen / CarbonylfluoridCOF21 ppm (HF)
FluorwasserstoffHF1 ppm
FormaldehydCH2O0.3 ppm
GermanGeH40.2 ppm
HydrazinN2H40.01 ppm
IodI20.1 ppm
KohlenmonoxidCO30 ppm
MonomethylsilanSiH3CH35 ppm (SiH4)
NickeltetracarbonylNi(CO)40.2 mg/m3 (Ni)
Pentakis(dimethylamino)tantal (PDMATa)Ta(N(CH3)2)52 ppm (Dimethylamin)
PhosgenCOCl20.02 ppm
PhosphinPH30.1 ppm
PhosphorpentachloridPCl51 mg/m3
PhosphortribromidPBr30.5 ppm
PhosphortrichloridPCl30.5 ppm
PhosphortrifluoridPF33 ppm
PhosphorylchloridPOCl30.2 ppm
RuthenocenC10H10Ru20 mg/m3 (Ru)
SchwefeldioxidSO20.5 ppm
SchwefelwasserstoffH2S5 ppm
SelenwasserstoffH2Se0.015 ppm
SilanSiH45 ppm
SiliziumtetrachloridSiCl42 ppm (HCl)
SiliziumtetrafluoridSiF41 ppm (HF)
SiliziumtrichloridSiHCl32 ppm (HCl)
StibanSbH30.1 ppm
StickstoffdioxidN2O4 (NO2)3 ppm
StickstoffmonoxidNO25 ppm
Tantal(V)-chloridTaCl52 ppm (HCl)
Tantal(V)-fluoridTaF51 ppm (HF)
Tantal(V)-ethoxidTa(OC2H5)520 mg/m3 (Ta2O5)
t-Butylarsen (TBAs)AsH2(C4H9)0.01 mg/m3 (As)
t-Butylphosphor (TBP)PH2(C4H9)0.1 ppm (PH3)
TellurhexafluoridTeF60.02 ppm
TetrabromomethanCBr41 ppm (HBr)
TetraethylorthosilicatSi(OC2H5)410 ppm
Tetrakis(dimethylamino)hafnium (TDMAHf)Hf(N(CH3)2)42 ppm (dimethylamine)
Tetrakis(dimethylamino)titan (TDMATi)Ti(N(CH3)2)42 ppm (dimethylamine)
Tetrakis(dimethylamino)zirkon (TDMAZr)Zr(N(CH3)2)42 ppm (dimethylamine)
Tetrakis(ethylmethylamido)hafnium (TEMAHf)Hf(NC2H5CH3)42 ppm (dimethylamine)
Tetrakis(ethylmethylamido)zirkonium (TEMAZr)Zr(NC2H5CH3)42 ppm (dimethylamine)
TitantetrachloridTiCl42 ppm (HCl)
TitantetrafluoridTiF41 ppm (HF)
Trichlormethylsilan / MethylsilylchloridCH3SiCl32 ppm (HCl)
TriethylaluminumAl(C2H5)32 mg/m3 (Al)
TriethylboranB(C2H5)30.5 mg/m3 ( H3BO3)
TriethylgalliumGa(C2H5)33 mg/m3 (Ga2O3)
TriethylindiumIn(C2H5)30.1 mg/m3 (In)
TriethylphosphatPO(C2H5O)350 mg/m3
TrimethylphosphitC3H9O3P2 ppm
Trimethylaluminum (TMAl)Al(CH3)32 mg/m3 (Al)
TrimethylantimonSb(CH3)30.5 mg/m3 (Sb)
TrimethylborB(CH3)30.1 ppm
Trimethylgallium (TMGa)Ga(CH3)33 mg/m3 (Ga2O3)
Trimethylindium (TMIn)In(CH3)30.1 mg/m3 (In)
TrisilanSi3H85 ppm (SiH4)
WolframhexacarbonylW(CO)65 mg/m3 (W)
WolframhexafluoridWF61 ppm (HF)
XenondifluoridXeF21 ppm (F2)

* Die Konfiguration des Absorbers richtet sich nach der jeweiligen Prozessapplikation